Micro-Nano Processing



Micro-Nano Fabrication

Micro-Nano Processing

Atomic Layer Deposition (ALD) Equipment

• ALD Series

Chemical Mechanical Polisher Machine (CMP)

• AP 300 Single Polisher

• xCMP 150

Coating Customized Solution

• CCS Model

Electron Beam Lithography System (EBL)

• Electron Beam Exposure System Pharos310

High Vacuum Solution

• Small Molecule Sublimation Purification Equipment

Micro-Nano Characterization

Surface Analysis

Atomic Force Microscopes (AFM)

• AFM Electrical Measurements Systems

• AFM Galaxy Dual Controller

• Educational Scanning Microscope Probe

• Educational Scanning Tunneling Micro-Scope (FM-Nano View T-STM)

• HYBRID NANOPROFILER (AFX-1000-3D)

• Nano - Observer XL

• Nano - Observer AFM Best Cost-Effective Solution.

• Park NX-7

• Park NX-10

• Park NX-20

• Park NX-Wafer

Confocal Micro Raman & PL Spectroscope

• Off - Line Scenario for Demo & Custom Made (QC/QA/FA/RD)

• In-Line Scenario for Custom Made & Automation

Digital Zoom Microscope

• Digital Upright Microscopes

• Digital Stereo Microscopes

Microscope System

• Hyperspectral Microscope System

• Scanning Microwave Impedance Microscopy (sMIM)

• Scanning Thermal Microscopy (SThM)

Field Emission Scanning Electron Microscope FESEM

Film Thickness Measurement

• Ellipsometers

Stylus Profiler

• Tencor® P-7 Stylus Profiler

Optical Detect System

• AT-1

Optical Profilometer

• Profilm3D Optical Profilometer

Optical Measurement

• 3D Measuring Microscope Micro1000

• HUD (Head-Up-Display)

• Wafer Internal Stress Tester SV200

• Wafer Warpage Stress Gauge

In-Situ & Mechanical Characterization

Cathodoluminescence Imaging

• Cathodoluminescence Imaging & Spectral Detection System

• Cathodoluminescence Imaging System

In-Situ Systems

• Electron Microscope In-Situ Bias Heating System

• In Situ AFM In SEM

• In-Situ Heating Chips & Holders

• In-Situ TEM Four-Degree-of-Freedom Nanomanipulator

• In-Situ Tensile Testing

Tribological Logic & Mechanical Testing

• Force Measurement

• Tribometer

Electrical Characterization

Probe Stations

Resistivity Measurement System

Sheet Resistivity Mapping System

• Filmetrics® R54 Series

Micro-Nano Auxiliary Equipment

Vibration Isolators

Active Vibration Isolator

• Table Top Active Isolation System

• Compact Active Isolation System For Normal SEM

• Base Platform Type Pneumatic Active Isolation System

• Active Psolation System For Laser-Optic Measurement

• Active Isolation System With Anti-Noise Chamber

• Multi-Purpose Enclosure

• MINI-450F

• MINI-560F

• ARISTT Series

• ARISMD PRO Series

Passive Vibration Isolator

• SOTOTT Series

• SOTOMD PRO Series

Customize Vibration Isolator

• Multi-Purpose Enclosure

• SMU

Customer Service

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General Consumables (Accessories)

Application & Services