Product Overview
The Filmetrics R54 is a cutting-edge system designed for measuring and mapping the sheet resistance and conductivity of materials.
It's particularly useful in industries that rely on conductive films, such as semiconductor manufacturing and flexible electronics.
Key Features and Benefits
Enclosed System:
Allows for the measurement of samples that are sensitive to light or environmental factors.
Accommodates Large Samples:
Can handle samples up to 300mm in diameter.
Versatile Measurement Configurations:
Available with both Four-Point Probe (4PP) and non-contact Eddy-Current (EC) measurement options.
Wide Measurement Range:
Capable of measuring sheet resistance across a ten-decade range on both conductive and semi-conductive films.
Customizable Mapping:
Users can define specific measurement points using various patterns (rectangular, linear, polar, and custom).
High-Precision Stage:
Equipped with a precise X-Y stage for accurate positioning.
Small Spot Size:
The EC configuration offers the smallest spot size in the industry for highly detailed measurements.
User-Friendly Software:
Features an intuitive software interface for ease of use.
Compatibility:
Works seamlessly with all KLA sheet resistance probes.
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