PL-A Vacuum Pressure Type

Product Overview

The PL-A series is a pneumatically driven, fully automated, multi-functional mass-produced nanoimprint system that uses a UV light source to cure up to 12-inch products. Combined with our company's self-developed SFP& Hybrid Mold composite template imprinting technology, it can support the minimum imprint resolution of less than 20nm, and support curved surface imprinting.

The PL-A series nanoimprint system has the advantages of high productivity, ultra-high resolution imprinting, full automation, and simple operation.

• Maximum impression size: 300mm (12in.)
  
• Minimum resolution < 20nm
  
• Supports substrates such as silicon, quartz, sapphire, silicon oxide, etc
  
• Fully automated process
  
• UV curing light source: UVLED flood light source (365nm, light intensity> 800mW/cm2)
  
• Equipment cleanliness: 100 and above