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Micro-nano Fabrication

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Ion Beam Etching (IBE Etching)

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Small Molecule Sublimation Purification Equipment

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EtchLab - 300 (RIE Etching) EtchLab - 300 (RIE Etching)

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ICP Etching - 300

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Customized Solution Customized Solution

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Pioneer 120 Advanced PLD System

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Pulsed Laser Deposition System (Pioneer 180 PLD System)

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PVD Thin Film Deposition System（SVAC-FilmLab-G）

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PVD Thin Film Deposition System（SVAC-FilmLab-B）

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PVD Thin Film Deposition System（SVAC-FilmLab-T）

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Nanoimprint Mold Nanoimprint Mold

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PL-SR Stepper Nanoimprint System

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PL-AT Molecular Surface Treatment System

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PL-A Vacuum Pressure Type PL-A Vacuum Pressure Type

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Cathodoluminescence Imaging System

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