Base Platform Type Pneumatic Active Anti-Vibration System

Product Overview

Electron Microscopes are vulnerable to vibration disturbances caused by several factors including structural resonance due to floor vibration input.
Pneumatic passive isolation systems will not creat enough vibration environment to bring out the optimal performance of the microscopes for observing high-magnification and high-resolution images.

VAIS-PB is a base-platform type active anti-vibration system optimized for electron microscopes (SEM, TEM and FIB). With its pneumatic support frame, the system outperforms the competitors metal spring-based systems and effectively eliminates aperiodic impulse vibration.
Since the successful commercialization in 2015, the systems high-performance capabilities have been applied to several electron microscope manufacturers worldwide.

Basic Information

Application Direction

1. Application Notes
(1) With a built-in pneumatic passive anti-vibration system, electron microscopes and FIBs require environments free of low-frequency vibration disturbance below 10Hz, usually produced by building's structural resonance. VAIS-PB isolates 300 to 500 times more vibrations than the passive system in the resonance range.

(2) After successfully applying the system to FEI Quanta 250 FEG in 2014, VAIS-PB continues to show excellent performance in several other electron microscopes and FIBs manufactured by Hitachi, Zeiss, Jeol, Tescan, and numerous others.

(3) VAIS-PB consistently provides a stable vibration environment with its pneumatic support frame, which is robust against aperiodic impulse input.

(4) Using the air spring support, VAIS-PB can be applied in a wide range of equipment weights, from lighter SEM and FIB to heavier TEM and STM.

Target Instruments

 2.Target Instruments

• Scanning Electron Microscope (SEM)
  
• Focused Ion Beam (FIB)
  
• Transmission Electron Microscope (TEM)
• Scanning Tunneling Microscope (STM)
  
• Heavy Load Precision Instrument