HYBRID NANOPROFILER (AFX-1000-3D)

Product Overview

The Cross-scale nanoprofiler NANOPRO(HYBRID) FILER AFM-1000-3D is a high-performance atomic force microscope (AFM) designed for precise surface characterization and metrology. It enables researchers to investigate and analyze the topography, roughness, and other critical features of various materials at the nanoscale level.

Basic Information

XY motorized stage range of motion
(The resolution of the grating scale is 20 nm):300mm×300mm;

• Z motorized stage range of motion
  (Grating ruler resolution 5 nm):30mm;
  
• Probe Scanner Range: 100um×100um×15um;
  
• XY closed-loop position control noise：1nm;
  
• Noise of the whole machine (Z).:30pm;
  
• Longitudinal scale and roughness measurements：3σ0.01nm;
  
• Transverse scale measurements：3σ1nm(or 1%Range);
  The image resolution can reach 2048×2048.

Main Applications:

It can be applied to the surface shape of precision machined components, including optical lenses, mirrors and metalworking parts of various sizes, as well as to the measurement of intermediate and high frequency roughness. It can also be used for nanoscale precision measurement of various materials, including wafers, polymer materials, two-dimensional materials, etc.

Technical information

High-precision measuring head

• Probe scanner range:100um×100um×15um; · XY Closed-loop position control noise:1nm;
  
• Noise of the whole machine (Z):30pm;
  
• Displacement sensing noise：40fm/ Hz;

It has the function of emergency stop protection, which can trigger the emergency stop when the probe accidentally hits the sample and other dangerous conditions, so as to protect the probe and sample.

No adjustment needle exchange technology
High-precision mechanical positioning combined with magnetic suction technology to achieve probe-laser

• Photoelectric sensors are automatically aligned, no optical path adjustment is required.

Cross-scale scanning platform (optional)

• Linear motor drive;
  
• Scan table stroke: 20mm;
  
• Longitudinal stability: ±2nm; · Grating resolution: 5nm;
  
• Repeatability accuracy：100nm。

High-speed FPGA feedback controller

• It has the ability of high-precision analog signal input and output; Linear power supply for very low noise;
  
• It has 10 channels of data acquisition, signal analysis, display and storage capabilities;
  

Support sine wave voltage output, frequency range covers DC-2MHz, frequency increment step0.1Hz;
The digital IO interface supports high-precision control of 5-axis motors.

Application examples

roughness

3D key scale measurement of roughness and pattern, precision measurement of roughness
(metrology) 3sigma up to 10pm;  The longitudinal resolution is better than 30 pm, and the transverse resolution depends on the sharpness of the pSi sheet roughness robe, and the transverse resolution of the system is higher than 0.1nm.

Dimensional precision

Dimensional precision measurement: support 5:1 aspect ratio trench structure key dimension measurement, including CD, LER, LWR,   support XY to the maximum scanning range: 100um*100um, Z direction measurement range: 0.1nm-15um。

Cross-scale

Continuously precision measurement of steps from 0.1 nm to 1mm , including sidewall roughness, and sub-nanometer longitudinal resolution; This feature uses a unique patented technology and probe.