In Situ AFM In SEM

Product Overall

Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.

Basic information

• In-situ multimodal & correlative analysis
  
• Optimized & time-efficient workflow
  
• Ultimate performance inside SEM
  
• Open-hardware design for easy customization 

Benefits of AFM-In-SEM Solution

Complex and correlative sample analysis
Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.

In-situ sample characterization
In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

Precise localization of the region of interest
Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.

Novel Method of Correlative Imaging

Complex, yet time-efficient analysis via Correlative Probe and Electron Microscopy (CPEM) allows 3D correlative imaging that eliminates the need for repetitive tasks previously required to achieve similar kind of results.

All-in-one solution for automated in-situ analysis of multiple material properties enables unique combination of data such as topography, material contrast, mechanical or electrical properties resulting in three dimensional CPEM images.

Complex in-situ characterisation

AFM brings new inside-to-SEM method of characterisation, enabling the analysis of a broad range of properties:

Material mechanical propertiestopography
local elastic properties (tapping & contact mode)
local sample hardness (non-topographic)
depth-dependent material characterization
various in-situ operations

Material magnetic properties
magnetic domain imaging

Material electro-mechanical properties
piezoelectric domain imaging

Material electrical properties
conductivity map (including insulated areas)
local surface potential
local electrical properties (non-topographic)
sub-nanometer topography

LiteScope - Scan Head

LiteScope is an AFM designed for fast and easy integration within SEM (operational as a standalone AFM as well).

Supports Correlative Probe and Electron Microscopy technology (CPEM).

• Comprehensive surface characterization material mechanical, magnetic, electro-mechanical and electric properties
  
• Compact design compatible with most SEM systems
  
• Easy SEM mounting or removal in less than five minutes
  
• Compatible with FIB, GIS, EDX, and other accessories
  
• Self-sensing probes without optical detection or laser adjustment
  
• Special accessories and modules