Product Description
Specifications

Product Overview

Product Name: UV-Ozone Cleaning Systems
The UV-Ozone Cleaning System is primarily designed for the electronics and semiconductor industry, as well as applications in biology, chemistry, physics, and materials science research laboratories. To meet the high-quality and reproducible requirements of industrial research institutions, Novascan has developed the PSD/PSDP series of UV-Ozone products. These products offer excellent performance for applications including:

  • Molecular-level cleaning
  • Surface oxidation
  • Surface modification
  • Ozone decomposition
  • Enhanced surface wettability
  • AFM sample cleaning
  • Decontamination

Product Series

1.PSD-UV Series: Provides basic digital flowrate control

2.PSDP-UV Series: Offers flow control functionality with PID temperature control

3.PSDP-UVT Series: Features PID control with added heating capabilities and process enhancement options

Series Features

PSD-UV Series Features

  • Digital control platform with 4×4 inch or 12×16 inch cleaning chamber
  • Equipped with a non-mercury UV lamp that provides high cleaning efficiency
  • Four-inch sample size maximum
  • System includes output exhaust port
  • User-friendly simple digital control interface
  • Easy-to-operate dual-button controls
  • Programmable working times: 15, 30, 60, 120 minutes
  • Process can be stopped at any time during operation
  • System provides high temperature selection
  • Economical design makes the PSD series a popular choice
  • Easy installation and operation

This UV-Ozone cleaning system combines advanced technology with user-friendly operation to provide effective surface cleaning and modification capabilities for research and industrial applications.

PSD Pro Series

The PSDP series is a research-grade UV-Ozone cleaning system with excellent adaptability. It can accommodate various molecular-level cleaning applications and can operate directly in a vacuum environment or through a passage where gas flow generates ozone. The programmable digital controller allows for systematic parameter settings to ensure consistent and optimized cleaning results.

Key Features

  • Programmable digital controller
  • Digital display with timer
  • Easy to upgrade with heating option
  • Executable start and stop commands
  • Internal memory to store frequently used parameter settings

This through-flow system provides powerful process control capabilities!

PSDP-UVT Pro Series

The PSDP-UVT Pro series features PID-controlled sample heating capabilities and is suitable for electronics, semiconductors, optical research fields, and UV lamp production. It can effectively self-clean silicon, oxides, glass, metals, ceramics, and other materials. Like other products in the PSDP-UVT series, it can utilize UV cleaning, UV modification, and AFM sample preparation as well as ozone treatment.

The heating function of the PSDP-UVT Pro series can accelerate multiple application cleaning processes, making it more versatile and efficient for various cleaning requirements.

The system combines advanced temperature control with proven UV-Ozone technology to provide a comprehensive cleaning solution for research and industrial applications.

Product Features

  • Digital temperature control with heating up to 150 degrees
  • PSDP-UVT capable of removing organic and foreign matter
  • UV lamp wavelength range from 185nm to 254nm
  • Generates ozone molecules for decomposition
  • Can operate in vacuum or low-pressure gas environments
  • Uses clean compressed air for operation

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