3D Measuring Microscope Micro1000

Product Overview

Three-dimensional surface microscopic measurement and roughness evaluation are widely used in precision machining, semiconductor processing, material analysis and other fields

Basic Information

Application direction

Precision optical components, micro-nano fabrication devices, metal machining parts, wafers, etc

Technical characteristics

Advantage

• Sub-nanometer longitudinal resolution, suitable for smooth surface measurement and analysis
  
• Simple, precise, fast, and repeatable
  
• Rich measurement modes support different 2D/3D measurement needs

Function

• Non-contact measurement of 3D surface roughness
  
• Microscopic 3D structure measurement of surfaces
  
• Film thickness measurement and analysis
  
• Microreflectance spectroscopy measurement (optional).