Filmetrics® R50

Product Overview

Filmetrics' thin film resistance measurement equipment is developed from KLA's thin film resistance measurement technology, which has more than 30 years of experience, and Filmetrics, which has 20 years of experience in the development of benchtop measurement equipmentThe team has perfected the desktop block resistance measurement product. KLA thin film resistance measurement techniques include contact (4PP) and non-contact (EC) methods.

Basic Information

Filmetrics' R50 series of square resistance measurement instruments measure conductive sheets and thin films deposited on a variety of substrates, spanning 10 orders of magnitude of resistivity, including:

• Semiconductor wafer substrates
  
• Glass substrates
  
• Plastic (flexible) substrates
  
• PCB pattern features
  
• solar cell
  
• Flat panel displays layers and patterned features
  
• Metal foil
  
• Second, the main functions

Application

• Supports a wide range of measurements, including but not limited to the following:
  
• Metal film thickness, substrate thickness, square resistance, resistivity, conductivity, doping concentration, etc.