SUME MA-L8 Series (SEMI-AUTOMATED MASK ALIGNER)

Basic Information

SUME MA-L8 is a high-precision double-sided alignment semi-auto matic lithography machine that performs standard lithography processes
with high quality. It can also be customized design and development according to the technical accumulation of the team in the field of front-end lithography, combined with the actual process requirements of customers. SUME MA-L8 series products are setting a new benchmark for lithography devices in academia, MEMS and NEMS, 3D integration and compound semiconductor markets.

Application Direction

High precision leads to higher quality crafts
manship.

The SUME MA-L8 series can be equipped with a highly precise TSA（top-side alignment）system. It reliably supports an alignment accuracy down to 0.25 μm (requires certain parameters), supported by auto or direct alignment.

Many applications such as MEMS packaging require alignment on both sides of the substrate. The SUME MA-L8 series can optionally be equipped with bright-field bottom-side microscopes, providing for alignment

Performance

Excellent cost performance

With its enhanced ergonomic and user-friendly design、cost efficiency and reduced footprint, The SUME MA-L8 series is the perfect tool for use in
research and lowvolume production.

In addition, this equipment is equipped with an energy-saving LED light source as standard for users, which can save more operation and maintenance costs. The equipment is sturdy and durable, and its modular design makes component replacement easy. With the application of LED
light sources, the SUME MA-L8 series greatly reduces maintenance costs.